ULTRANNEAL

heat treating, cleaning, etching, implanting and leveling machines, and parts and tooling therefore, for use in the production of semiconductors and flat panel displays; and operating manuals sold as a unit with heat treating, cleaning, etching, implanting and leveling machines

Stepper, scanner and full-field, laser processing and implanting machines, and illumination, inspection and measurement apparatus, tooling and parts therefore, for processing or implanting wafers, flat panel displays and other substrates; electron-beam systems, and illumination, inspection and measurement apparatus, tooling and parts therefore, for processing semiconductor wafers, flat panel displays and other substrates; reticles and masks for use with said stepper, scanner and full field laser processing and implanting machines and electron-beam systems for use in manufacturing said semiconductor wafers, flat panel displays and other substrates, wherein said reticles and masks contain the pattern to be processed on said semiconductor wafer, flat panel display and other substrates; specialized optical components, substrate, reticle and mask transport stages for use in manufacturing semiconductor wafers, flat panel displays and other substrates; computer software for use in controlling, and used with, heat treating, cleaning, etching, stepper, scanner and full field laser processing, implanting and leveling machines, and electron-beam systems for manufacturing semiconductor wafers, flat panel displays and other substrates; replacement parts and consumable materials for, and manuals delivered with, the aforesaid goods