LM8

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

LM7

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

LIGHT-SPEED

Machinery and 2 other

Owner

ULTRATECH, INC.

QUAD-FIELD

Machinery and 2 other

Owner

ULTRATECH, INC.

MICROS

Machinery

Owner

ULTRATECH, INC.

X-TREMELY FAST

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

TECHNOLOGY ACCEPTED

Machinery and 2 other

Owner

ULTRATECH, INC.

ULTRATECH/CNT

Machinery

Owner

ULTRATECH, INC.

FIJI MED ALD

Machinery and 3 others

Owner

ULTRATECH, INC.

FIJI MED

Machinery and 3 others

Owner

ULTRATECH, INC.

SAVANNAH MED ALD

Machinery and 3 others

Owner

ULTRATECH, INC.

SAVANNAH MED

Machinery and 3 others

Owner

ULTRATECH, INC.

SUPERFAST 4G

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

SUPERFAST 3G

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

SUPERFAST

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

SMART ALD

Machinery and 3 others

Owner

ULTRATECH, INC.

SMARTMEDALD

Machinery

Owner

ULTRATECH, INC.

MEDALD

Machinery

Owner

ULTRATECH, INC.

CAMBRIDGE NANOTECH INCORPORATED

Machinery

Owner

ULTRATECH, INC.

Mar 21, 2006
ALD SHIELD

Machinery

Owner

ULTRATECH, INC.

Dec 21, 2010
SAPPHIRE

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

LSACU

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

LASER SPIKE ANNEAL CU

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.

LSAK

Electrical and Scientific Apparatus

Owner

ULTRATECH, INC.