ULTRABEAM

apparatus for electron-beam lithography, illumination, inspection and measurement, and parts therefore; computer software for operating electron-beam lithography, illumination, inspection and measurement apparatus and user manuals sold therewith; and audio and video recordings for training in the use of electron-beam lithography, illumination, inspection and measurement apparatus

user manuals and various printed forms for use with electron-beam lithography, illumination, inspection and measurement apparatus; and training materials, namely, printed training manuals and workbooks for training in the use of electron-beam lithography, illumination, inspection and measurement apparatus

repair and maintenance services for electron-beam lithography, illumination, inspection and measurement apparatus; and parts and materials therefore

educational courses and training services for the use, maintenance and repair of electron-beam lithography, illumination, inspection and measurement apparatus