76280500
Jul 5, 2001
May 6, 2003
Active Trademark
precision optics, namely, lens housings with ultra-high density deep UV optical disks, photo lithographic catadioptric reduction lenses; metrology instruments, namely, interferometers, [diffractive cylinder] grazing-incidence interferometer, laser based interferometer for measuring deviations from flatness of a surface, apparatus for analyzing semiconductor wafers during the polishing process
Electrical and Scientific Apparatus