76280501
Jul 5, 2001
Oct 8, 2002
precision optics, namely, lens housings with ultra-high density deep UV optical disks, photolithographic catadioptric reduction lenses; metrology instruments, namely, interferometers, diffractive cylinder grazing-incidence interferometer, laser based interferometer for measuring deviations from flatness of a surface, apparatus for analyzing semiconductor wafers during the polishing process
Electrical and Scientific Apparatus