76328620
Oct 22, 2001
Feb 18, 2003
Semiconductor wafer processing equipment, namely, thermal treatment reactors, chemical vapor deposition reactors, and plasma-enhanced chemical vapor deposition reactors; electronically operated apparatus for the manufacture of semiconductors and for the deposition of thin films on semiconductor wafers by chemical vapor deposition or plasma-enhanced chemical vapor deposition, as well as components and replacement parts thereof
Electrical and Scientific Apparatus