76328621
Oct 22, 2001
Jul 6, 2004
Semiconductor wafer processing equipment, namely, thermal treatment reactors, chemical vapor deposition reactors and plasma enhanced chemical vapor deposition reactors; electronically operated apparatus for the manufacture of semiconductors and for the deposition of thin films on semiconductor wafers by chemical vapor deposition or plasma-enhanced chemical vapor deposition; as well as components and replacement parts thereof
Electrical and Scientific Apparatus