Mark Identification

I903

Serial Number

76201861

Filing Date

Jan 30, 2001

Trademark by

TEGAL CORPORATION

Classification Information

SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNITS, RF GENERATORS, ELECTRICAL POWER SUPPLY, DIGITAL CONTROLLERS, AND CIRCUIT BOARDS AND RELATED COMPUTER SOFTWARE FOR CLEANING, ETCHING AND TREATMENT APPLICATIONS

Machinery