Mark Identification

983

Serial Number

76201862

Filing Date

Jan 30, 2001

Trademark by

TEGAL CORPORATION

Classification Information

SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNITS, RF GENERATOR, ELECTRICAL POWER SUPPLY, DIGITAL CONTROLLER, AND CIRCUIT BOARDS AND RELATED COMPUTER SOFTWARE FOR CLEANING, ETCHING AND TREATMENT APPLICATIONS

Machinery