76374966
Feb 26, 2002
Apr 15, 2003
Semiconductor measuring and control devices, including computer hardware and software components, for use in measuring and controlling individual semiconductor wafers, including the reflectivity of growing wafer surfaces and wafer surface temperatures; mechanical tools and instruments for the manufacture of semiconductors, namely, chemical vapor deposition reactors, and computer hardware and software for use in the manufacture of semiconductors
Electrical and Scientific Apparatus