Mark Identification

EPITUNE

Serial Number

76374966

Filing Date

Feb 26, 2002

Registration Date

Apr 15, 2003

Trademark by

AIXTRON AG

Classification Information

Semiconductor measuring and control devices, including computer hardware and software components, for use in measuring and controlling individual semiconductor wafers, including the reflectivity of growing wafer surfaces and wafer surface temperatures; mechanical tools and instruments for the manufacture of semiconductors, namely, chemical vapor deposition reactors, and computer hardware and software for use in the manufacture of semiconductors

Electrical and Scientific Apparatus