EPITUNE

Electrical and Scientific Apparatus

Owner

AIXTRON AG

Nov 11, 2003
AIXWORKS

Electrical and Scientific Apparatus

Owner

AIXTRON AG

—
TRICLEAN

Machinery

Owner

AIXTRON AG

Sep 21, 2004
EPITUNE

Electrical and Scientific Apparatus

Owner

AIXTRON AG

Apr 15, 2003
HETEROWAFER

Computer and Scientific

Owner

AIXTRON AG

Jun 15, 2004
TRICENT

Machinery and 2 other

Owner

AIXTRON AG

Mar 19, 2002
THE CVD ENGINEERING COMPANY

Treatment of Materials and 2 other

Owner

AIXTRON AG

Sep 19, 1995