Mark Identification

DEPOSITION MODE

Serial Number

76402571

Filing Date

Apr 30, 2002

Trademark by

MATERIALS INC.

Classification Information

Semiconductor wafer processing equipment and operational software and components for such equipment, namely, wafer processing equipment in the nature of epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, measuring and monitoring tools, and chemical mechanical polishers; all such equipment used for the processing and production of semiconductor substrates, thin films, silicon discs and wafers

Electrical and Scientific Apparatus