LAVACOAT

Repair kits composed of texturizing and decontamination component parts, such as shields, rings and discs used in the repair, maintenance and reconditioning of semiconductor wafer processing equipment for the production of semiconductor substrates, thin films, silicon discs and wafers, which processing equipment is in the nature of epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, and ion implanters

Maintenance and Repair of Semiconductor Processing and Production Equipment