ADVANCED SOURCE METROLOGY INSTRUMENT (ASMI)

Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and pinhole cameras located either above or below the reticle plane with corresponding oversized openings in the reticle plane, the whole in the same form factor as a standard reticle for use in exposing photographically prepared patterns and images that are used for measuring and aiming to the surfaces of wafers for use in manufacturing of integrated circuits