75296270
May 22, 1997
Charging circuit for applying increased potentials to a surface to be cleaned, thereby increasing Zeta potentials at or near the surface, for enhancing cleaning efficiency in a particulate contaminant collecting system, for use in an aqueous based cleaning system for cleaning wafers, semiconductor surfaces, hard disks, and other storage media, namely, CD-ROMs and substrates used in disk drive manufacture
Electrical and Scientific Apparatus