75428419
Feb 3, 1998
Apr 23, 2002
Active Trademark
Semiconductor manufacturing machines, CVD (Chemical Vapor deposition) machines, PVD (physical vapor deposition) machines, diffusion machines, oxidation machines, etching machines, washing apparatus, epitaxtial reaction machines, epitaxtial growth machines, ion implantation machines, semi-conductor wafer processing machines, washing machines and parts for all the foregoing
Machinery[ thin film, made of semiconductor, metal and insulator forming apparatus, integrated circuit manufacturing apparatus and semiconductor elements manufacturing apparatus ]
Electrical and Scientific Apparatus[ annealing units and heat treatment units for semiconductor manufacturing ]
Environmental Control Apparatus