ZARIS

AUTOMATED RETICLE INSPECTION SYSTEM COMPRISED OF A ROBOT AND SELF-CONTAINED WORKCELL PROVIDING NON-CONTAMINATING HANDS-OFF RETICLE INSPECTION; AUTOMATED RETICLE INSPECTION SYSTEM COMPRISED OF A ROBOT, SELF-CONTAINED WORKCELL AND COMPUTER SOFTWARE SOLD AS A UNIT FOR THE OPERATION THEREOF, PROVIDING NON-CONTAMINATED HANDS-OFF RETICLE INSPECTION