MICROMACHINED DEVICES FOR MICRO-POSITIONING, LIGHT BEAM SCANNING AND POINTING IN IMAGE PROCESSING EQUIPMENT, DOCUMENT SCANNERS, LASER PRINTERS, FINGERPRINT SCANNERS, LASER PROCESSING EQUIPMENT, AND LIGHT BEAM SWITCHES; ALSO USED FOR METROLOGY IN POSITION- MEASURING EQUIPMENT, 3D-MEASUREMENT EQUIPMENT, ENVIRONMENTAL SENSING EQUIPMENT, SPECTRUM ANALYZERS, GYROSCOPES, PROFILOMETERS, ATOMIC FORCE MICROSCOPES, FIELD EMISSION MICROSCOPES, AND FLUID FLOW METERS
Electrical and Scientific Apparatus