Machines for the assembly and packaging of electronic semiconductor chips; machines for manufacturing semiconductors, and structural parts therefor; semiconductor manufacturing machines; semiconductor manufacturing machines and systems composed of a vacuum chamber for accommodating semiconductor wafers and structural parts therefor and machines for handling and transferring semiconductor wafers into and out of the vacuum chamber, and structural parts therefor; machines for the treatment of semiconductor wafers, namely, semi-conductor wafer processing machines, and structural parts therefor; industrial robots for the handling of semiconductor wafers; reactors for processing semiconductor wafers, namely, industrial chemical reactors for the thermal treatment of semiconductor wafers and industrial chemical reactors for chemical vapor deposition
MachineryElectrical reactors for processing semiconductor wafers; electronic controllers for industrial robots for use by the semiconductor industry; electronic control systems for semiconductor manufacturing machines; structural parts for the aforementioned goods, namely, chemical reactors
Electrical and Scientific Apparatus