76565158
Dec 2, 2003
Mar 8, 2005
Optical and electro-optical devices, namely, silicon carbide optics, deformable mirrors, photonics modules, adaptive optic systems comprising a deformable optical element, an actuator for deforming the optical element, a wavefront sensor, a control circuit to operate the actuator, and an integrating telescope, and active devices comprising an optical or mechanical element and an actuator for moving or deforming the optical or mechanical element, and a control circuit, and control electronics therefore
Electrical and Scientific Apparatus