78112226
Mar 3, 2002
May 2, 2006
Systems and parts used in the production of semiconductors, namely, photomasks; wireless radio frequency generators; semi-conducting and semi-insulating and polycrystalline gallium arsenide in the form of wafers; high density interconnectors; electric or electronic sensors for sensing light; opto-electronics, namely, lasers; radio frequency power devices, namely, radio frequency generators; sputtering systems, namely, thin film making sputterers, surface cleaning sputterers and etching sputterers
Electrical and Scientific Apparatus