WOOLLAM-ISE

EQUIPMENT, NAMELY, ELLIPSOMETER BASED APPARATUS FOR MEASURINGTHICKNESS, TEMPERATURE CAUSED EFFECTS, AND OPTICAL PROPERTIES OFSEMICONDUCTORS, DISK DRIVES, MAGNETIC DATA STORAGE MEDIA, OPTICALDATA STORAGE MEDIA, THIN FILMS, MULTIPLE LAYER FILMS AND COATINGS ONSUBSTRATES, AND COMPUTER PROGRAMS NECESSARY FOR CONTROLLING THEELLIPSOMETER BASED APPARATUS AND FOR ANALYZING ACQUIRED ELLIPSOMETRICDATA