76714996
Sep 20, 2013
EQUIPMENT, NAMELY, ELLIPSOMETER BASED APPARATUS FOR MEASURING THICKNESS, TEMPERATURE CAUSED EFFECTS, AND OPTICAL PROPERTIES OF SEMICONDUCTORS, DISK DRIVES, MAGNETIC DATA STORAGE MEDIA, OPTICAL DATA STORAGE MEDIA, THIN FILMS, MULTIPLE LAYER FILMS AND COATINGS ON SUBSTRATES, AND COMPUTER PROGRAMS NECESSARY FOR CONTROLLING THE ELLIPSOMETER BASED APPARATUS AND FOR ANALYZING ACQUIRED ELLIPSOMETRIC DATA
Electrical and Scientific Apparatus