Mark Identification

WLRAS

Serial Number

76421631

Filing Date

Jun 11, 2002

Registration Date

Mar 15, 2005

Trademark by

TOKYO ELECTRON KABUSHIKI KAISHA

Classification Information

Machines for manufacturing semiconductors

Machinery

electronic measurement system comprised of hardware and software for evaluating the electromigration of metallic wiring on the wafer level, reducing the evaluation cost and the time between the beginning of evaluation and the end of analysis

Electrical and Scientific Apparatus