Mark Identification

WAFERTRAC

Serial Number

73169098

Filing Date

May 4, 1978

Registration Date

Jun 30, 1981

Trademark by

GCA CORPORATION

Classification Information

Computer Controlled Machines for Processing Semi-Conductor Wafers-Namely, Automatic Spin Processors and Automatic Transport Modules

Machinery

Automatic Indexers Used in Processing Semi-Conductor Wafers, and Computerized Controls for Machines for Processing Semi-Conductor Wafers-Namely, Master Controllers and Programmers

Electrical and Scientific Apparatus

Automatic Ovens for Processing Semi-Conductor Wafers, and Laminar Flow Hoods

Environmental Control Apparatus