73169098
May 4, 1978
Jun 30, 1981
Computer Controlled Machines for Processing Semi-Conductor Wafers-Namely, Automatic Spin Processors and Automatic Transport Modules
MachineryAutomatic Indexers Used in Processing Semi-Conductor Wafers, and Computerized Controls for Machines for Processing Semi-Conductor Wafers-Namely, Master Controllers and Programmers
Electrical and Scientific ApparatusAutomatic Ovens for Processing Semi-Conductor Wafers, and Laminar Flow Hoods
Environmental Control Apparatus