Mark Identification

WAFERSTATE

Serial Number

75666568

Filing Date

Mar 24, 1999

Trademark by

BROOKS-PRI AUTOMATION INC.

Classification Information

COMPUTER SOFTWARE USED IN SEMICONDUCTOR PRODUCTION PROCESSES, FOR FACILITATING PROCESS CONTROL OF SEMICONDUCTOR PRODUCTION PROCESSES, TO MODEL AND CONTROL SYSTEM DEVELOPMENT AND ANALYSIS THEREOF IN THE FIELD OF SEMICONDUCTOR PRODUCTION PROCESSES, AND FOR USE IN REAL-TIME CONTROL OF SEMICONDUCTOR PRODUCTION PROCESSES

Electrical and Scientific Apparatus