Mark Identification

WAFERGARD

Serial Number

78137063

Filing Date

Jun 19, 2002

Registration Date

Jul 19, 2005

Trademark by

ENTEGRIS INC.

Classification Information

Fluid dispensing systems comprised of dispense pumps, and dispense pumps and controllers sold as a unit, and filter manifolds, for use in the microelectronics manufacturing industry

Machinery

Fluid dispensing systems namely controllers for dispense pumps, for use in the microelectronics manufacturing industry

Electrical and Scientific Apparatus