WAFERCLEAN

CARBON DIOXIDE PROCESSING AND CLEANING SYSTEMS AND COMPONENTS THEREOF, NAMELY, AN ENCLOSED PROCESSING/CLEANING ASSEMBLY, CO2 JET SPRAYERS AND SPRAY NOZZLES, HOLDERS AND CONVEYORS FOR HOLDING AND CONVEYING THE MATERIALS TO BE PROCESSED AND CLEANED THROUGH THE PROCESSING/CLEANING ASSEMBLY, AIR BLOWERS, AIR FILTERS, HEATERS FOR HEATING THE MATERIALS TO BE PROCESSED AND CLEANED

CONTROL ELECTRONICS, NAMELY, COMPUTER SOFTWARE FOR USE WITH CO2 PROCESSING AND CLEANING SYSTEMS, NAMELY, FOR CONTROLLING THE INTENSITY AND DIRECTION OF CO2 JET SPRAY, CONTROLLING THE MOVEMENT OF CO2 JET SPRAYERS AND SPRAY NOZZLES, CONTROLLING THE MOVEMENT OF THE CONVEYORS, CONTROLLING THE TEMPERATURE OF INTERIOR OF THE PROCESSING/CLEANING ASSEMBLY AND MATERIALS TO BE CLEANED, CONTROLLING BLOWERS AND FILTERS; AND INSTRUCTION MANUALS SOLD THEREWITH