77001479
Sep 18, 2006
Jul 1, 2008
Software for electron beam writing and process technology, in particular, for simulating and optimizing high-resolution electron beam writing and nanometer process technologies; software for the design, testing and fabrication of photographic masks; electronic semi-conductors; integrated circuits; photo-lithographic masks; magnetic heads; chips, namely, chips for testing and investigating genes or other biological molecules, LCD panels, flat panel display screens, magnetic domain memories
Electrical and Scientific Apparatus