75727745
Jun 14, 1999
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, NAMELY-- EPITAXIAL REACTORS; CHEMICAL VAPOR DEPOSITION REACTORS; PHYSICAL VAPOR DEPOSITION REACTORS; PLASMA ETCHERS; ION IMPLANTERS; CHEMICAL MECHANICAL POLISHERS; AND MACHINES USED TO MANUFACTURE SEMICONDUCTOR SUBSTRATES, SILICON DISCS, AND SILICON WAFERS
Electrical and Scientific Apparatus