97448959
Jun 8, 2022
Phosphor-coated fiber optic temperature measurement probes for controlling processes involving RF, electromagnetic fields and interference, magnetic fields, and high voltages; Phosphor-coated fiber optic temperature measurement probes for controlling MRI systems; Phosphor-coated fiber optic temperature measurement probes for controlling processes involving power transformers; Phosphor-coated fiber optic temperature measurement probes for controlling semiconductor etch and deposition processes; Phosphor-coated fiber optic temperature measurement probes for controlling wafer temperature during high aspect ratio shaping and machining processes; and Phosphor-coated fiber optic temperature measurement probes for providing accurate, precise, and repeatable temperature measurements from -200 degrees Celsius to 450 degrees Celsius
Electrical and Scientific Apparatus