76140878
Oct 5, 2000
Jul 9, 2002
mechanically operated implements, namely, tools for single substrate wet processing with our without using chemicals for cleaning and etching microelectronic, micro-optical and micromechanical components, namely, wafers, photomasks and semi-finished components for chips and structural parts therefor
Machinerymachines for single substrate processing for drip-drying and drying micro-optical and micro-mechanical components, namely, chips/ic's, photo masks and semi-finished components for chips and structural parts therefor
Environmental Control Apparatus