75867342
Dec 8, 1999
Sep 16, 2003
Material handling machines for loading and unloading standard mechanical interface containers during the manufacture of semiconductor wafers, flat panel displays, magnetic media, and reticles; factory automation machines for loading and unloading standard mechanical interface containers during the manufacture of semiconductor wafers, flat panel displays, magnetic media, and reticles
MachineryComputer hardware and related computer software for controlling material handling machines and factory automation equipment
Electrical and Scientific Apparatus