76119353
Aug 30, 2000
COMPUTER SOFTWARE, NAMELY, DOWNLOADABLE SOFTWARE WHICH REMOTELY MONITORS THE CONDITION AND FUNCTIONALITY OF SEMICONDUCTOR MANUFACTURING EQUIPMENT AND WHICH TRIGGERS PARAMETRIC, TIME-BASED AND WAFER-BASED MAINTENANCE NOTIFICATIONS
Electrical and Scientific ApparatusREMOTE MONITORING OF THE CONDITION AND FUNCTIONALITY OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Computer and Scientific