Mark Identification

VCS

Serial Number

75035604

Filing Date

Dec 21, 1995

Registration Date

Feb 17, 1998

Trademark by

VERTEQ INC.

Classification Information

apparatus for cleaning and rinsing semiconductor wafers in which wafers may be placed into a tank and subjected to a series of liquid cleaning and rinsing steps while being subjected to megasonic energy propagated into the liquid

Electrical and Scientific Apparatus