VASEMANAGER

IDENTIFY EQUIPMENT, NAMELY ELLIPSOMETER BASED APPARATUS FOR MEASURING THICKNESS AND OPTICAL PROPERTIES OF SEMICONDUCTOR, DISK DRIVE, MAGNETIC STORAGE MEDIA, OPTICAL DATA STORAGE MEDIA, THIN FILMS AND MULTIPLE LAYER FILMS ON SUBSTRATES AND COATINGS, AND EFFECTS CAUSED BY TEMPERATURE CHANGES; AND COMPUTER PROGRAMS NECESSARY FOR CONTROLLING THE ELLIPSOMETER BASED APPARATUS FOR ANALYZING ACQUIRED ELLIPSOMETRIC DATA