VAQFLEX

Semiconductor manufacturing machines; vacuum treatment installations for coating, deposition, plasma treatment and plasma etching, namely, vacuum semiconductor manufacturing machines for thin-film coating, thin-film deposition and epitaxy as well as plasma treatment; Machine parts for vacuum treatment installations, namely, vacuum pumps and stands for vacuum pumps, valves, and connecting rods

Cooling apparatuses and installations for semiconductor manufacturing machines; cooling systems using vacuum-insulated ducts for cooling vacuum treatment chambers; Vacuum refrigeration machines featuring coolants

Flexible vacuum-insulated ducts made primarily of metal for use in semiconductor manufacturing machines

Installation, maintenance, and repair services in the nature of setting up and adjusting vacuum technology machines and equipment

Scientific research; Planning, design and scientific analysis of vacuum coating processes such as sputtering, chemical vapor deposition and epitaxy with plasma enhancement for use in the field of semiconductor products, tools, and vacuum treatment installations for use in manufacturing processes and treatment processes; Technological consultation in the field of vacuum technology