VANTARA

Apparatus and instalments, namely, gas filters, namely, traps for obtaining a sample of a gas-phase contaminant from a gas, gas filtering systems, namely, instruments and apparatus for obtaining a sample of gas-phase contaminants from a gas, and gas monitoring systems, namely, instruments and apparatus for determining gas-phase contaminants in a gas, for use in connection with the gas industry, namely, for the determination of gas purity, semiconductor processing systems, and semiconductor processing tools