75259027
Mar 18, 1997
Jan 25, 2000
apparatus for film thickness measurement, namely, ellipsometers, spectroscopic ellipsometers, reflectometers, spectroscopic reflectometers, picosecond ultrasonic laser sonar equipment, and film resistance measurement equipment for use in the semiconductor, disk drive, magnetic data storage, optical data storage, thin films and coating industries
Electrical and Scientific Apparatus