VAC

Chemical gases sold with gas supply equipment for storing gases and dispensing such gases on demand, namely, chemical gases sold in a metal vessel holding the gas in a pressurized or liquid form, with a pressure regulator within said vessel and a flow control valve for on-demand dispensing of such gas for use in semiconductor manufacturing

Gas supply equipment for storing gases and dispensing such gases on demand, namely, a metal vessel holding the gas in a pressurized or liquid form, with a pressure regulator within said vessel and a flow control valve for on-demand dispensing of such gas