UTILE300

Computer software for electron beam lithography system; computer software for use in electron beam lithography system which exposes electron beam on the wafer to form circuit patterns; computer operating system for managing operation of software for use in electron beam lithography system; computer operating system for managing operation of applications software for use in electron beam lithography system; control software for writing electron beam on the wafer

Design, programming and maintenance of computer software for use in electron beam lithography system; design, programming and maintenance of computer software for use in electron beam lithography system which exposes electron beam on the wafer to form circuit patterns; design, programming and maintenance of computer operating system for managing operation of software for use in electron beam lithography system; design, programming and maintenance of computer operating system for managing operation of application software for use in electron beam lithography system; design, programming and maintenance of control software for writing electron beam on the wafer; design, programming and maintenance of computer software