Mark Identification

UNILOAD

Serial Number

73315151

Filing Date

Jun 17, 1981

Registration Date

May 31, 1983

Trademark by

MACHINE TECHNOLOGY INC.

Classification Information

Stand Alone Scrubbers for Cleaning; Photoresist and Doping Agent Coaters; and Spin Coaters for Use in Processing Semiconductor Wafers and Masks

Machinery

Stand Alone Negative and/or Positive Developer Machines for Use in Processing Semiconductor Wafers and Masks; and Multiple Process Scrubber, Photoresist and Doping Agent Coater, Spin Coater, Negative and/or Positive Developer, Vacuum Bake and/or Processor Apparatus, Sold as a Unit, for Processing Semiconductor Wafers and Masks

Electrical and Scientific Apparatus

Stand Alone Microwave Vacuum Baking Units for Use in Processing Semiconductor Wafers and Masks

Environmental Control Apparatus