73315151
Jun 17, 1981
May 31, 1983
Stand Alone Scrubbers for Cleaning; Photoresist and Doping Agent Coaters; and Spin Coaters for Use in Processing Semiconductor Wafers and Masks
MachineryStand Alone Negative and/or Positive Developer Machines for Use in Processing Semiconductor Wafers and Masks; and Multiple Process Scrubber, Photoresist and Doping Agent Coater, Spin Coater, Negative and/or Positive Developer, Vacuum Bake and/or Processor Apparatus, Sold as a Unit, for Processing Semiconductor Wafers and Masks
Electrical and Scientific ApparatusStand Alone Microwave Vacuum Baking Units for Use in Processing Semiconductor Wafers and Masks
Environmental Control Apparatus