75635082
Feb 4, 1999
Aug 7, 2001
[ MICROMACHINERY COMPONENTS, NAMELY, MICRO ELECTRONIC MECHANICAL SYSTEMS COMPRISED OF GEARS, PUMPS, ENGINES AND MICRO-MOTORS, FOR USE IN THE MANUFACTURE OF INTEGRATED CIRCUITS ]
MachinerySEMICONDUCTOR SUBSTRATES AND WAFERS, FOR USE IN FLAT PANEL DISPLAYS, INTEGRATED OPTICAL WAVE GUIDES AND SENSORS; MICROMACHINERY COMPONENTS, NAMELY, MICRO ELECTRONIC MECHANICAL SYSTEMS COMPRISED OF MEMBRANES, POUTRES, TRANSISTORS, THERMOCOUPLES, OPTOGUIDES, CAVITIES, GAUGES, LENSES, ACCELEROMETERS, GUIDES, SENSORS, RESISTORS, SUSPENDED BRIDGES, MIRRORS, FOR USE IN THE MANUFACTURE OF INTEGRATED CIRCUITS
Electrical and Scientific Apparatus