76181530
Dec 15, 2000
Mar 11, 2003
Active Trademark
Semiconductor wafer processing equipment, operational software, and components, namely-- epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers; all for the processing and production of semiconductor substrates, thin films, silicon chips and silicon wafers
Electrical and Scientific Apparatus