85981728
Mar 15, 2012
Jul 22, 2014
Thin-film solar cells and modules; crystalline-silicon solar cells and modules; solar panels for production of energy; Balance of Systems (BoS) solar photovoltaic equipment, namely, inverters; Production equipment used in thin-film solar module manufacturing, namely, evaporation chambers, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, ion implanters, and operational software sold as a component for any of the foregoing; all for the processing and production of thin films on various substrates
Electrical and Scientific Apparatus