75524129
Jul 21, 1998
Aug 26, 2003
semiconductor manufacturing machines, namely, machines for chemical treatment of substrates and other semi-conductor materials, semiconductor fabrication and chemical deposition machines, plasma or reactive ion etching machines, magnetron sputtering machines, evaporation machines, and mechanical pumps and valves for use with the foregoing semiconductor manufacturing machines; apparatus for handling and storing semi-conductor wafers, namely, conveyors, and mechanical racks
MachineryComputers, computer software, and electronic controls for use with semiconductor manufacturing machines for the treatment of semi-conductor materials, the fabrication of semi-conductor devices, chemical deposition, sputtering, evaporation and vacuum processing
Electrical and Scientific Apparatus