TOPBEAM

Machines and structural parts therefor, for coating plastic and paper with metal comprising layers and/or oxidic layers, and for vacuum coating by vapour-deposition, cathodic sputtering and/or by a low-pressure plasma pretreatment of the foils; machines and structural parts therefor, for plasma aftertreatment of the coated foils, comprising vacuum chambers, vacuum pumps, reeling devices, electron-beam guns and also generator chambers, cathode arrangements, crucible arrangements, electron-beam evaporators, resistance evaporators, microwave generators and microwave conductors, devices for supplying the vacuum chambers with process gases, namely, pumps, hoses, tubes, pipes and gas showers