TOPBEAM

Machines and structural parts, for the coating of foils, namely, foils consisting of plastic and/or paper, with metallic and/or non-metallic layers, namely, oxidic layers, and installations assembled therefrom, namely, for vacuum coating by vapour-deposition, by cathodic sputtering or by a low-pressure plasma pretreatment of the foils to be coated and/or plasma aftertreatment of the coated foils, comprising vacuum chambers, vacuum pumps, reeling devices, electron emitters, namely, electron-beam guns and also generator chambers, cathode arrangements or crucible arrangements, electron-beam evaporators, resistance evaporators, microwave generators and microwave conductors, devices for supplying the vacuum chambers with process gases, namely, pumps, hoses, tubes, pipes and gas showers

electric monitoring and control instruments for vacuum coating