74094964
Sep 10, 1990
Feb 16, 1993
superconducting electronic circuits and devices; namely, superconducting quantum interference devices, bolometers, rapid frequency filters, resonators, cavities, transmission lines, multi-chip modules, analog signal processors, and digital signal processors, apparatus for fabricating thin film superconductors; namely, systems including chambers for depositing thin superconducting films by means of laser ablation or sputtering and instruments for use in fabricating or testing superconductors; namely, substrate heaters, target holders and mutual inductance testers
Electrical and Scientific Apparatus