78423564
May 24, 2004
May 24, 2005
THIN FILM THICKNESS MEASUREMENT SYSTEM COMPRISED OF A SPECTROPHOTOMETER, MICROSPECTROPHOTOMETFR, NANOSPECTROPHOTOMETER, SPECTROMETER, REFLECTOMETER, ELLIPSOMETER, SPECTROSCOPIC ELLIPSOMETER; MICROSCOPE, IMAGING SYSTEM, MONOCHROMATOR, AND SOFTWARE FOR DATA ACQUISITION, SIMULATION AND REGRESSION PROVIDED THEREWITH; STRESS MEASUREMENT SYSTEM COMPRISED OF LASER BEAMS, MOTOR CONTROLLERS AND SOFTWARE FOR DATA ACQUISITION, SIMULATION AND REGRESSION PROVIDED THEREWITH
Electrical and Scientific Apparatus